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发明名称
摘要
申请公布号
CH566843(A5)
申请公布日期
1975.09.30
申请号
CH19730017974
申请日期
1973.12.20
申请人
INTERNATIONAL BUSINESS MACHINES CORP.
发明人
分类号
H01L21/00;H01L21/677;H01L21/683;(IPC1-7):B23Q41/00;H01L21/02
主分类号
H01L21/00
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