| 摘要 |
<p>PURPOSE:To stabilize characteristics of electric resistance even under a condition of a large temperature change by using a composite material of a compound composed of a combination of three elements, i.e., zirconium, silicon and carbon, especially by using a composite material of zirconium carbide and silicon carbide. CONSTITUTION:A vacuum tank 1 is first evacuated to produce a vacuum; zirconium 3 evaporated by using an electron-beam evaporation apparatus 2. A prescribed voltage and a prescribed electric current are arranged to be applied on an ionization electrode 4 and a discharge plasma is formed. Then, after an electric discharge has been stabilized, tetramethylsilane(Si(CH3)4) gas is introduced; a reactive ion plating operation is executed by means of zirconium and tetramethylsilane; a thin film is formed on a ceramic substrate 5 which has been placed at the upper part of a zirconium evaporation source. Thereby, a composite film 8 composed mainly of zirconium carbide and silicon carbide can be formed; it is possible to obtain an extremely excellent characteristic as a heat-generating resistor such as a thermal head or the like.</p> |
