| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning probe microscope capable of enlarging a moving range of a sample stand with a simple structure and heightening rigidity. SOLUTION: This microscope is equipped with a coarse adjustment mechanism 410 optionally movable on an XY-plane, and a coarse stage 400 having a sample stand 430, the coarse adjustment stage 400 being placed on a frame 550. An engaging member 561 is engaged with the frame 550 freely slidably in the vertical direction, and the engaging member 561 is moved slidingly by a slide moving mechanism 583. The slide moving mechanism 583 pulls the engaging member 561 upward and separated in from a base table 120, to release fixed holding of the coarse adjustment mechanism 410, and the engaging member 561 is landed on the base table 120, to fix and hold the coarse adjustment mechanism 410 on an optional position.
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