| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic sensor element which is small and low-cost, whose output is high, whose linearity of an output with reference to a detection magnetic field is superior and whose temperature characteristic is superior. SOLUTION: Two long thin-film magnetic cores 4 which are formed on a nonmagnetic substrate are arranged in parallel. First electrodes 7 and second electrodes 8 are installed at both ends of the respective thin-film magnetic cores 4. Two thin-film MI elements 3a wherein thin-film coils 5, for bias, and thin-film coils 6, for feedback, which are wound respectively in the same number of turns are formed on the thin-film magnetic cores 4 via respective insulating films 9, at set intervals, on the same plane, alternately and in the same direction are formed, A structure in which the differential output of both thin-film MI elements 3a is taken out is formed. Thereby, a differential magnetic sensor whose size is miniaturized as a whole can be manufactured. As a result when a magnetic field which is generated in a very small space is measured, an equal magnetic field can be applied to the two thin-film MI elements 3a on the same nonmagnetic substrate. As a result, an equal output can be taken out differentially from the respective thin-film MI elements 3a.
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