| 摘要 |
PROBLEM TO BE SOLVED: To provide a pattern defect detecting method and a pattern defect detector equipped with linear image sensors, having a simple mechanism, high processing speed, and a reference pattern dispensing with data replacement even if its specifications are changed, since a pattern matching method using a reference pattern has problems that its mechanism is complicated and its processing speed is low, and further has problems that the reference pattern has to be replaced or the data of the reference pattern have to be replaced when the specifications are changed, which takes much labor and cost. SOLUTION: A figure pattern on a moving object of inspection is imaged by a line linear sensor array with three or more parallel disposed linear sensors. Exclusive logical OR operation of two signals among the signals outputted from the sensor array is implemented for at least two combinations of signals. The figure of pattern edges is extrapolated by using the result of the operation to find figure data. Defects in the pattern of the object of inspection are detected from the transition of the figure data.
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