Internal member for plasma-treating vessel and method of producing the same

摘要

It is to propose an internal member for a plasma treating vessel having excellent resistances to chemical corrosion and plasma erosion under an environment containing a halogen gas and an advantageous method of producing the same, which is a member formed by covering a surface of a substrate with a multilayer composite layer consisting of a metal coating formed as an undercoat, Al₂O₃ film formed on the undercoat as a middle layer and Y₂O₃ sprayed coating formed on the middle layer as a top coat.