| 摘要 |
An apparatus for fabricating a semiconductor device having a load lock port and a method for manufacturing a semiconductor using the same are provided to reduce conveying process time within a load-lock pod and reduce the time due to alignment in an equipment front end module and shorten a progress path inside by processing alignment of a wafer within the load-lock pod. A load lock port(100) comprises: a slot part(310) having a plurality of slots and containing a wafer; grip holders(210) which are positioned at a periphery of the wafer and are connected to the side of the wafer in guide alignment; a driving part which is connected to the grip holders and concentrates the grip holders around the center of the wafer and aligns the wafer. A load lock chamber is connected to the load lock ports, and the wafer arranged in guide is delivered from the load lock port to the load lock chamber. A processing chamber is connected to the load lock chamber and a individual process of the wafer delivered from the load lock chamber is performed in the processing chamber.
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