发明名称 Composition for removing photoresist layer and method for using it
摘要 A composition for removing a photoresist layer and a method for using it are disclosed. The composition comprises a chemical portion which includes water and chemical constituents dissolving or softening the photoresist layer and a mechanical portion which is abrasive particles. Using the composition and the method according to the present invention can decrease the conventional two steps of removing a photoresist layer process to one step, thereby simplifying the procedure, shortening the removing time and reducing the cost. The chemical constituents in the composition according to the present invention are of low toxicity and flammability and the amount used is small, which makes it more friendly with the environment and decreases the expense of disposing the waste.
申请公布号 US2009100764(A1) 申请公布日期 2009.04.23
申请号 US20060920247 申请日期 2006.05.12
申请人 WANG SHUMIN;YU CHRIS CHANG 发明人 WANG SHUMIN;YU CHRIS CHANG
分类号 C09G1/02;B24B27/033;B24B37/00;C09G1/04;G03F7/42 主分类号 C09G1/02
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