MOTOR, ACTUATOR, SEMICONDUCTOR MANUFACTURING DEVICE, AND FLAT DISPLAY MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a motor that can more surely prevent dust generated therein from flowing out to the outside.SOLUTION: A motor 1 comprises: a stator 21; a rotor 22; a rotor housing 42 that rotates together with the rotor 22; a stator housing 41 that fastens the stator 21, forms spaces 100A and 100B between the rotor housing 42 and the stator housing, and overlaps with the rotor housing 42 across first gaps 6A and 6B over the whole circumference in a circumference direction; annular members 10 and 18 that overlap with the stator housing 41 across second gaps 8A and 8B over the whole circumference in the circumference direction in the spaces 100A and 100B; air exhaust holes 13A and 13B for suctioning and exhausting air inside the spaces 100A and 100B through the second gaps 8A and 8B; and air exhaust grooves 12A and 12B that are interposed among the second gaps 8A and 8B and the air exhaust holes 13A and 13B and formed in the stator housing 41 along the second gaps 8A and 8B over the whole circumference in the circumference direction.SELECTED DRAWING: Figure 1