| 发明名称 |
Apparatus for doping semiconductor rods during floating zone melt processing thereof |
| 摘要 |
An apparatus for controllably doping semiconductor rods during a floating zone melt processing thereof which includes a selectively movable doping nozzle positioned in the vicinity of the induction heating coil and having an exhaust opening movable toward and away from the semiconductor rod.
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| 申请公布号 |
US3908586(A) |
申请公布日期 |
1975.09.30 |
| 申请号 |
US19740447745 |
申请日期 |
1974.03.04 |
| 申请人 |
SIEMENS AKTIENGESELLSCHAFT |
发明人 |
SPORRER, LUDWIG |
| 分类号 |
C30B13/10;C30B13/12;H01L21/208;(IPC1-7):C23C13/12 |
主分类号 |
C30B13/10 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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