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发明名称
PATTERN FORMING
摘要
申请公布号
JPS5553423(A)
申请公布日期
1980.04.18
申请号
JP19780127086
申请日期
1978.10.16
申请人
FUJITSU LTD
发明人
YONEDA YASUHIRO;KITAMURA TATEO;KITAKOUJI TOSHISUKE
分类号
H01L21/027;H01L21/302
主分类号
H01L21/027
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