| 摘要 |
PURPOSE:To perform resolving power inspection and MTF measurement simultaneously with magnification adjustment and focusing by moving a lens to be inspected and an object surface or photodetection surface into function relation. CONSTITUTION:A grating chart 2 placed on the object surface 1 is lighted by a lighting system 3 and its image is formed on the photodetection surface 5 through the lens 4 to be inspected. The image on the photodetction surface 5 is observed to measure the resolving power, photodetected by a solid-state image pickup element on the photodetection surface 5, and calculated to measure MTF. A lens moving base 6 where the lens 4 to be inspected is held is moved at a speed VL in optical-axis directions along a feed screw 9 by a driving mechanism 7 and at the same time, the photodetection surface 5 is also moved at a speed v1 along the feed screw 9 by a driving mechanism 8. The driving mechanisms 7 and 8 are so related that vL=[1/(1+m)]Xv1, where (m) is image-formation magnification. |
