| 摘要 |
PROBLEM TO BE SOLVED: To provide a moving stage with a buffering function for preventing the damage of an IC. SOLUTION: The stage 2 has a rectangular groove 2A for mounting an IC 1. A plurality of bearings 3 are mounted on the periphery of the groove 2A. A moving base 4 stands a shaft 4A coupled to the bearing 3. An elastic member 5 is interposed between the stage 2 and the base 4. A linear rail 6 is slidably coupled to the base 4. When the IC 1 of the groove 2A is pressed and sucked at the stopping position of te base 4, the member 5 is compressed to reduce the impact and excess pressure to be given to the IC, thereby preventing the physical damage of the IC. |
