发明名称 |
Diamond and its preparation by chemical vapor deposition method |
摘要 |
A diamond having improved properties is produced by a method which comprises introducing a mixture of hydrogen (A), an inert gas (B) and a carbon-containing compound (C) in molar ratios which satisfy the following equations: <IMAGE> and <IMAGE> generating a low temperature plasma with one of direct current and an alternating current electromagnetic field under pressure of 5 to 760 Torr to form the diamond on a substrate, wherein there is no substantial differnce between a place where the plasma is generated and a place where the diamond is formed on the substrate.
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申请公布号 |
US5270028(A) |
申请公布日期 |
1993.12.14 |
申请号 |
US19920884891 |
申请日期 |
1992.05.18 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD. |
发明人 |
TANABE, KEIICHIRO;IMAI, TAKAHIRO;FUJIMORI, NAOJI |
分类号 |
C23C16/27;C30B25/10;(IPC1-7):C01B31/06 |
主分类号 |
C23C16/27 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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