发明名称 Diamond and its preparation by chemical vapor deposition method
摘要 A diamond having improved properties is produced by a method which comprises introducing a mixture of hydrogen (A), an inert gas (B) and a carbon-containing compound (C) in molar ratios which satisfy the following equations: <IMAGE> and <IMAGE> generating a low temperature plasma with one of direct current and an alternating current electromagnetic field under pressure of 5 to 760 Torr to form the diamond on a substrate, wherein there is no substantial differnce between a place where the plasma is generated and a place where the diamond is formed on the substrate.
申请公布号 US5270028(A) 申请公布日期 1993.12.14
申请号 US19920884891 申请日期 1992.05.18
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD. 发明人 TANABE, KEIICHIRO;IMAI, TAKAHIRO;FUJIMORI, NAOJI
分类号 C23C16/27;C30B25/10;(IPC1-7):C01B31/06 主分类号 C23C16/27
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