INSPECTION EQUIPMENT OF SEMICONDUCTOR DEVICE AND DAM BAR CUTTING DEVICE

摘要

PROBLEM TO BE SOLVED: To obtain an inspection equipment and a dam bar cutting device which are capable of accurately measuring the number and width of the cut dam bars of a semiconductor device so as to quickly detect cutting failures even if dam bars to cut are changed in dimensions with the change of a semiconductor device in type and size. SOLUTION: After dam bars are cut off, rectangular wave signals T corresponding to the width of the cut part of the dam bar are generated from a comparator 14, the number of pulses of pulse signals sent from an encoder 10a is counted in the rise time of the rectangular wave signals T through a counter circuit, and the number of counts is compared with a certain value based on a design value through a quality judging circuit. By this setup, trouble as to the cutting of a dam bar can be quickly detected.