PATTERN FORMING METHOD AND METHOD OF MANUFACTURING LIQUID CRYSTAL DISPLAY

摘要

PROBLEM TO BE SOLVED: To lessen the number of process steps to reduce the manufacturing cost. SOLUTION: Using mask patterns 121a, 121b as masks, a metal film 106 and an n<+> silicon film 105 are dry etched one after the other, and the mask patterns 121a, 121b are heated to reflow.