ORGANIC CHLORIDES SHOWING A REDUCED EFFECT UPON THE DESTRUCTION OF THE OZONE LAYER FOR USE DURING SILICON THERMAL OXIDATION AND FURNACE TUBE CLEANING,申请号KR19930010390-传众专利搜索

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发明名称	ORGANIC CHLORIDES SHOWING A REDUCED EFFECT UPON THE DESTRUCTION OF THE OZONE LAYER FOR USE DURING SILICON THERMAL OXIDATION AND FURNACE TUBE CLEANING
摘要
申请公布号	KR970000421(B1)	申请公布日期	1997.01.09
申请号	KR19930010390	申请日期	1993.06.09
申请人	AIR PRODUCTS AND CHEMICALS INC	发明人	LAGENDIJK, ANDRE;ARTHUR, KENNETH HOCHBERG;DAVID, ALLEN ROBERT
分类号	C01B7/01;C23C16/44;C23G5/028;H01L21/31;H01L21/316;(IPC1-7):H01L21/304	主分类号	C01B7/01
代理机构		代理人
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