| 摘要 |
<p>PURPOSE:To provide a tool for reduction of differences among judging persons in a device for controlling the progress of lots to be fabricated in a semiconductor wafer process factory, etc., wherein upon scheduling the process a scheduled simultation result can be known at once with a feeling, and complicated judgement is simplified properly rapidly. CONSTITUTION:There are provided a display device 1 for displaying thereon a schedule and an actual result, an operation panel 2 for establishing a scheduled plan, and a controller 3 including a simulation program where simulation upon a designed schedule is applied to the process and a scheduled plan program where a result inputted on the operation panel is displaced on the display device. Resistance upon handling of the operation panel 2 is produced in conformity with a program having a rule specified by data of the simulation result and is controlled in response to scheduled feasibility. The foregoing resistive force is arranged to be produced owing to electromagnetic force.</p> |
