发明名称 APPARATUS FOR BONDING SUBSTRATE
摘要 The present invention relates to a substrate bonding apparatus used for bonding a substrate and a film so as to reduce a defect rate of the substrate by increasing adhesion between the substrate and the film bonded to the substrate. The substrate bonding apparatus comprises: a substrate supply unit for supplying a substrate; a film supply unit for supplying a film attached to the substrate; an outer press roll to attach the film to the substrate; and an inner press roll formed inside the outer press roll, and transferring the outer press roll.
申请公布号 KR20160080829(A) 申请公布日期 2016.07.08
申请号 KR20140192244 申请日期 2014.12.29
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 PARK, SUNG YEOL
分类号 H01L21/603;H01L21/677 主分类号 H01L21/603
代理机构 代理人
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