TRANSPORT DEVICE, TRANSPORT METHOD, EXPOSURE APPARATUS, AND DEVICE PRODUCTION METHOD

摘要

PROBLEM TO BE SOLVED: To receive and deliver a substrate, without causing mounting deviation or deformation.SOLUTION: A transport device comprises: a first support part for supplying gas to one surface of a substrate, and capable of floating and supporting the substrate via the gas; a second support part capable of supporting one surface of the substrate; a drive part for moving at least one of the first and second support parts, and making the first and second support parts close to or contact with each other, and arranging them in a first direction; and a transfer part for moving the substrate supported by one of the first and second support parts being arranged by the drive part, to the other side in the first direction.SELECTED DRAWING: Figure 23