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发明名称
A METHOD FOR PRODUCING REFERENCE STRUCTURES AND A REFERENCE STRUCTURE
摘要
申请公布号
PL260608(A1)
申请公布日期
1988.05.12
申请号
PL19860260608
申请日期
1986.07.14
申请人
发明人
分类号
H01L;H01L21/04;(IPC1-7):H01L/
主分类号
H01L
代理机构
代理人
主权项
地址
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