| 摘要 |
PROBLEM TO BE SOLVED: To provide a X ray inspection device capable of easily allowing a focal point of a X ray generator and a rotation center of the X ray generator to coincide each other when viewed from a shaft direction of the rotation of the X ray generator in the X ray inspection device having a sealed tube type X ray inspection device to be used by rotation.SOLUTION: A X ray inspection device 1 includes: a two-dimensional X ray detector 4 disposed so as to sandwich an inspection object 2 between a sealed tube type X ray generator 3 kept always at vacuum inside a tube and the X ray generator 3; a XY movement mechanism 6 mounted with the X ray generator 3 and allowing the X ray generator 3 to move in a X direction and a Y direction orthogonal to each other; and a rotation mechanism 8 having a rotation table 7 mounted with the XY movement mechanism 6 and allowing the X ray generator 3 and the XY movement mechanism 6 to rotate with a Z direction orthogonal to the X direction and the Y direction as a shaft direction of the rotation.SELECTED DRAWING: Figure 1 |
