| 发明名称 |
PROCESS FOR DEFINED ETCHING OF SUBSTRATES |
| 摘要 |
PE-0212 TITLE PROCESS FOR DEFINED ETCHING OF SUBSTRATES A process is described for defined etching of holes using a silver mask formed by silver diffusion transfer imaging.
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| 申请公布号 |
CA2050629(A1) |
申请公布日期 |
1992.03.11 |
| 申请号 |
CA19912050629 |
申请日期 |
1991.09.04 |
| 申请人 |
DU PONT (E. I.) DE NEMOURS AND COMPANY |
发明人 |
CAIRNCROSS, ALLAN;THAYER, CHESTER A., II |
| 分类号 |
G03F7/06;G03C8/28;G03F7/07;H05K3/00;H05K3/06;H05K3/08;H05K3/10;H05K3/46;(IPC1-7):G03C8/24;H05K1/09 |
主分类号 |
G03F7/06 |
| 代理机构 |
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代理人 |
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| 主权项 |
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