| 摘要 |
PROBLEM TO BE SOLVED: To enable accurate carrying of a wafer to a specified position, prevent damage at a high temperature, and simplify arm mechanism, by rotatably connecting tip parts of a driving link and a driven link with a third arm by using pins, to be isolated in the longitudinal direction of the third arm. SOLUTION: An under pulley of a second pulley 31G is constituted as a first rotary mechanism, and an upper pulley of the second pulley 31G is constituted as a second rotary mechanism. A driving link 32A having an oblong shape which is connected with a driving shaft of the second pulley 31G, at a base end portion, so as to be able to reversely rotate, and a pair of right and left driven links 32B which are arranged below both sides of the driving link 32A are installed. A first pin 33B is perpendicularly hung from the center of a third arm 33, and two pins 33C are perpendicularly hung from side end portions, being isolated in the longitudinal direction of the third arm 33. The respective end portions of the driving link 32A and the driven links 32B are connected with a base link 32C and the third arm 33, at three points, and the respective connection points form triangles having the same size. Hence they are rotatably connected by using pins. |
