| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat insulator that is suitable, for example, when a treatment gas is introduced from the upper section of a reactor core tube, can increase the number of semiconductor wafers that can be heat-treated at once, and can improve efficiency for running a reactor. SOLUTION: The heat insulator for a heat treatment reactor has a support member 2, and pluralities of thin plates 3 provided in the support member 2. The thin plates 3 have gas permeation holes 6. The gas permeation holes 6 are arranged by shifting positions so that they do not oppose each other.
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