| 摘要 |
<p>[PROBLEMS] To provide a cryopump that attains an enhancement of regeneration efficiency, and that despite the adsorption or congelation of water molecules together with non-water molecules at the time of vacuum generation, attains a shortening of regeneration time. [MEANS FOR SOLVING PROBLEMS] The cryopump comprises chiller (5) for generating cold in an expansion chamber through reciprocation of displacers (14A,15A) in cylinders (14,15); cryopanel (10) and shield (9) cooled by the cold generated in the expansion chamber; and vacuum container (4) accommodating the cryopanel (10) and shield (9), etc. thereinside, wherein with the cryopanel capable of reverse temperature elevation of the cryopanel (10) and shield (9), the shield (9) is fitted with outflow aperture (18) for outflow of liquefied non-water molecules from the shield (9) to the vacuum container (4) and fitted with water reservoir (20) with storage capacity capable of storing water molecules (23) produced by regeneration.</p> |
