| 摘要 |
PURPOSE:To prevent mistakes on work and the complication of information control in the manufacturing process of an integrated circuit, and to improve the efficiency of production control by providing the manufacturing device with a mechanism capable of reading and writing. CONSTITUTION:A control table capable of reading and writing magnetically or electrically is read through a reading mechanism 6 first. The information of the control table is transmitted over a reading and writing processing mechanism 4 through a control signal line 11, contents are decided, the parameter of the conditions of manufacture is transmitted over a manufacture control mechanism 3, and a wafer is treated by a manufacturing section proper 2. The conditions of the device on actual work are transmitted over the reading and writing processing control mechanism 4 through a control signal line 15 from the manufacturing section proper 2, and written to the control table with a memory by a writing mechanism 5. |
