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发明名称
DEVICE FOR FORMING AND EVALUATING MULTI-LAYERED THIN FILM
摘要
申请公布号
JPS6411970(A)
申请公布日期
1989.01.17
申请号
JP19870168108
申请日期
1987.07.06
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
KATO YUJIRO;ASANO HIDEFUMI;TANABE KEIICHI;KUBO SHUGO;MICHIGAMI OSAMU
分类号
C23C14/36;C23C14/34;C23C14/35;C23C14/54
主分类号
C23C14/36
代理机构
代理人
主权项
地址
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