发明名称 |
Sample stage positioner offering lift and tilt down to picometer range under low temperatures comprises metal bellows containing expansible medium and electrical heater |
摘要 |
Each unit (1) of the positioner includes a thermoelectric lifting device (2). The overall state of the working medium (6) contained is temperature-dependent. A controlled electrical heater (8) extends into the medium.
|
申请公布号 |
DE19833904(A1) |
申请公布日期 |
2000.02.10 |
申请号 |
DE19981033904 |
申请日期 |
1998.07.22 |
申请人 |
HAHN-MEITNER-INSTITUT BERLIN GMBH |
发明人 |
WELZEL, STEPHAN |
分类号 |
B25J7/00;F15B5/00;F15B15/10;G01B9/10;G02B21/26;G05D3/10;G12B5/00;G12B21/20;G21K5/10;H01J37/20;H02N2/06;(IPC1-7):B25J7/00 |
主分类号 |
B25J7/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|