| 发明名称 |
Precision piezoelectric positioner for sample stage comprises individual piezoelectric elements connected electrically and mechanically in series |
| 摘要 |
Each piezoelectric assembly (1) comprises piezoelectric elements (3-7). The first element (3) is fixed in position. All other elements can move longitudinally. For longitudinal (piezoelectric) expansion ( DELTA L), they are connected (mechanically and electrically) in series, starting with the first.
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| 申请公布号 |
DE19833905(A1) |
申请公布日期 |
2000.02.10 |
| 申请号 |
DE19981033905 |
申请日期 |
1998.07.22 |
| 申请人 |
HAHN-MEITNER-INSTITUT BERLIN GMBH |
发明人 |
WELZEL, STEPHAN |
| 分类号 |
G02B21/26;G21K5/08;H02N2/04;(IPC1-7):B25J7/00;H01J37/20;G21K5/10;H01L21/68;G05D3/10;H02N2/06;G12B21/20;G12B5/00 |
主分类号 |
G02B21/26 |
| 代理机构 |
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代理人 |
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