发明名称
摘要 <p>PROBLEM TO BE SOLVED: To register an accurate basic position of a grinding wheel by registering the basic position automatically. SOLUTION: According to the method of registering a basic position of a straight cup grinding wheel 64, the straight cup grinding wheel 64 is to be moved toward a chuck table 52 by controlling a grinding wheel feeding device with a CPU. When the straight cup grinding wheel 64 comes in contact with the chuck table 52, the chuck table 52 is displaced to the axial direction by being pushed by the straight cup grinding wheel 64, therefore electric signals are outputted from a piezoelectric element 114. The position of the straight cup grinding wheel 64 when the detection signals are outputted is registered in a RAM of the CPU as a basic position. The movement of the cup straight cup grinding wheel 64 is stopped by controlling the grinding wheel feeding device simultaneously with the output of the electric signals.</p>
申请公布号 JP3401705(B2) 申请公布日期 2003.04.28
申请号 JP19980000945 申请日期 1998.01.06
申请人 发明人
分类号 B24B7/04;B24B47/22;B24B49/00;B24B51/00;H01L21/304;H01L21/68;(IPC1-7):B24B7/04 主分类号 B24B7/04
代理机构 代理人
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