摘要 |
A method for forming a carbon nanotube array on a metal substrate includes the following steps: providing a metal substrate ( 11 ); depositing a silicon layer ( 21 ) on a surface of the metal substrate; depositing a catalyst layer ( 31 ) on the silicon layer; annealing the treated substrate; heating the treated substrate up to a predetermined temperature in flowing protective gas; introducing a carbon source gas for 5-30 minutes; and thus forming a carbon nanotube array ( 51 ) extending from the treated substrate. Generally, any metallic material can be used as the metal substrate. Various carbon nanotube arrays formed using various metal substrates can be incorporated into a wide variety of high power electronic device applications such as field emission devices (FEDs), electron guns, and so on. Carbon nanotubes formed using any of a variety of metal substrates are well aligned, and uniformly extend in a direction substantially perpendicular to the metal substrate.
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