THERMAL TYPE AIR FLOW METER

摘要

PROBLEM TO BE SOLVED: To improve the measuring accuracy of a thermal type air flow meter.SOLUTION: A thermal type air flow meter includes: a sub-passage capturing part of a fluid to be measured; a sensor chip disposed in the sub-flow passage and measuring a flow volume of the fluid to be measured; an electronic component converting the flow volume of the fluid detected by the sensor chip into an electric signal and having a resistor therein; and a board mounting thereon the sensor chip and the electronic component, in which the substrate having a surface on which the electronic component is mounted is covered with a filler.SELECTED DRAWING: Figure 3