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发明名称
PROBENBEWEGUNGSVORRICHTUNG, PROBENBEWEGUNGSSYSTEM UND HALBLEITERHERSTELLUNGSVORRICHTUNG
摘要
申请公布号
DE3938156(A1)
申请公布日期
1990.05.17
申请号
DE19893938156
申请日期
1989.11.16
申请人
HITACHI, LTD., TOKIO/TOKYO, JP
发明人
KOBAYASHI, ISAO;HAMADA, YOSUKE, NIIHARI, IBARAKI, JP;MORI, KENJI, TSUCHIURA, JP;HIRAI, HIROMU, TSUKUBA, JP
分类号
B23Q1/00;B23Q1/34;B23Q1/44;B23Q1/48;B23Q1/56;B23Q5/22;B23Q5/28;B23Q5/34;B23Q5/36;G01Q10/02;G01Q10/04;G01Q80/00;G03F7/20;G05D3/00;H01L21/027;H01L21/30;H01L21/68
主分类号
B23Q1/00
代理机构
代理人
主权项
地址
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