发明名称 |
Scanning probe microscope having first and second optical waveguides |
摘要 |
A scanning probe microscope according to the present invention comprises a cantilever having a free end portion and a fixed end portion, the free end portion bearing a probe thereon, a semiconductor laser attached to the fixed end portion of the cantilever, an optical waveguide for guiding a laser beam, emitted from the semiconductor laser, to the free end portion, an optical element for dividing part of a center beam of the laser beam, guided through the optical waveguide, into laser beams in at least two perpendicular directions, a photoelectric transducer for receiving the divided laser beams and converting the laser beams into electrical output signals corresponding thereto, and a differential circuit for receiving the electrical signals and subjecting the signals to predetermined arithmetic processing, thereby detecting a three-dimensional displacement of the free end portion of the cantilever.
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申请公布号 |
US5274230(A) |
申请公布日期 |
1993.12.28 |
申请号 |
US19930040427 |
申请日期 |
1993.03.31 |
申请人 |
OLYMPUS OPTICAL CO., LTD. |
发明人 |
KAJIMURA, HIROSHI;FUNAZAKI, JUN;TOMABECHI, HIDEO;TAZAKI, HIROSHI;SAITO, KEISUKE;NAKAMURA, YASUSHI |
分类号 |
G01Q10/06;G01Q20/02;(IPC1-7):H01J3/14 |
主分类号 |
G01Q10/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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