发明名称 |
PERMANENT MASK RESIST, METHOD OF PRODUCING THE SAME, AND PERMANENT MASK RESIST LAMINATION SUBSTRATE |
摘要 |
PROBLEM TO BE SOLVED: To provide a permanent mask resist having high resistance and insulation property to moisture without deteriorating flexibility, heat resistibility for soldering and chemical resistibility as the permanent mask resist, and provide a method of producing the permanent mask resist and a permanent mask resist lamination substrate. SOLUTION: The permanent mask resist includes a group showed by formula (I) where X represents a n-valent metallic ion, and n represents the valence of the metallic ion. Activating light rays are projected on a photosensitive resin composition on the substrate, and then a water-washing development process is carried out using water-washing liquid and developing solution mixing or dissolving the metallic ion, and thereby the permanent mask resist is produced. |
申请公布号 |
JP2002162739(A) |
申请公布日期 |
2002.06.07 |
申请号 |
JP20000359530 |
申请日期 |
2000.11.27 |
申请人 |
HITACHI CHEM CO LTD |
发明人 |
YOSHIDA TETSUYA;SASAHARA NAOKI;TSUCHIYA KATSUNORI;NAKANO AKIO |
分类号 |
G03F7/033;G03F7/027;G03F7/038;G03F7/32;G03F7/40;H05K3/00;H05K3/28 |
主分类号 |
G03F7/033 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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