发明名称 PERMANENT MASK RESIST, METHOD OF PRODUCING THE SAME, AND PERMANENT MASK RESIST LAMINATION SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide a permanent mask resist having high resistance and insulation property to moisture without deteriorating flexibility, heat resistibility for soldering and chemical resistibility as the permanent mask resist, and provide a method of producing the permanent mask resist and a permanent mask resist lamination substrate. SOLUTION: The permanent mask resist includes a group showed by formula (I) where X represents a n-valent metallic ion, and n represents the valence of the metallic ion. Activating light rays are projected on a photosensitive resin composition on the substrate, and then a water-washing development process is carried out using water-washing liquid and developing solution mixing or dissolving the metallic ion, and thereby the permanent mask resist is produced.
申请公布号 JP2002162739(A) 申请公布日期 2002.06.07
申请号 JP20000359530 申请日期 2000.11.27
申请人 HITACHI CHEM CO LTD 发明人 YOSHIDA TETSUYA;SASAHARA NAOKI;TSUCHIYA KATSUNORI;NAKANO AKIO
分类号 G03F7/033;G03F7/027;G03F7/038;G03F7/32;G03F7/40;H05K3/00;H05K3/28 主分类号 G03F7/033
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