ISOLATION VALVE APPARATUS FOR THE EXHAUST LINE OF THE MANUFACTURING APPARATUS FOR SEMICONDUCTOR

摘要

An isolation valve apparatus for an exhaust line of a manufacturing apparatus for a semiconductor is provided to prevent adhesion of a reaction by-product due to a process gas by mounting a heating line and a temperature sensor inside a shaft and a valve body. A plate(20) opens/closes an exhaust line positioned between a process chamber(100) and an exhaust pump(200). An operating part(40) provides a power required for an opening/closing operation of the plate. One end of a shaft(30) is coupled with the plate. The other end of the shaft is connected to the operating part. The shaft delivers the power provided from the operating part to the plate. One end of a bellows(50) is coupled with the plate into a coaxial shaft. A valve body(10) has a hollow shape in order to reciprocate the shaft coupled with the plate. A heating line(60) for emitting a heat of high temperature and a temperature sensor(70) for measuring temperature emitted from the heating line are formed in at least one side of the shaft and the valve body.