| 摘要 |
[Problem] To provide a cleaning method for a monocrystal pulling device capable of removing foreign matter in a chamber to prevent occurrence of dislocation. [Solution] A cleaning method for a monocrystal pulling device according to the present invention involves: preparing a dummy crucible that simulates a crucible by including a dummy liquid surface simulating a liquid surface of a raw material melt in the crucible and a first dummy ingot simulating a monocrystal ingot that is being pulled upward from the liquid surface of the raw material melt; supplying an inert gas into a decompressed chamber of the monocrystal pulling device in a state where the dummy crucible is placed in the chamber; and generating a flow of the inert gas affected by the dummy crucible, thereby causing foreign matter attached to the wall surface of the chamber or to a component in the chamber to fall off. |
