Multi-link substrate scanning device

摘要

A substrate scanning device includes first, second and third linkages, and a direct drive motor coupled between a process chamber and a first end of the first linkage. A first gear motor coupled between a second end of the first linkage and a first end of the second linkage and a second gear motor coupled between a second end of the second linkage and a first end of the third linkage. A substrate support surface coupled to a second end of the third linkage. The direct drive motor for moving the substrate support surface parallel to a scan axis as the direct drive motor moves the substrate support surface along the scan axis. The first and second gear motors can be configured to maintain the substrate support surface in a plane approximately parallel with the scan axis.

主权项

1. A substrate scanning device comprising:
first, second and third linkages; a first joint connectable between a process chamber and a first end of the first linkage, wherein the first joint includes a direct drive motor, a second joint coupled between a second end of the first linkage and a first end of the second linkage, wherein the second joint includes a first gear motor, a third joint coupled between a second end of the second linkage and a first end of the third linkage, wherein the third joint includes a second gear motor; and
a substrate holder coupled to a second end of the third linkage;the first joint for moving the substrate holder along a scan axis; andthe second and third joints for maintaining a face of the substrate holder at a constant position and orientation as the first joint moves the substrate holder along the scan axis, wherein radial motion of the first joint displaces the second and third joints in a direction perpendicular to the scan axis.