IMPROVED METHOD OF CRYSTALLIZING AMORPHOUS MATERIAL WITH A MOVING ENERGY BEAM,申请号WO1980US01151-传众专利搜索

发明名称	IMPROVED METHOD OF CRYSTALLIZING AMORPHOUS MATERIAL WITH A MOVING ENERGY BEAM
摘要	<p>Improved method for crystallizing amorphous material (26) with a moving beam of energy (12). In this method, the energy beam (12) is scanned by (20) in a manner to provide controlled, continuous motion of the crystallization front.</p>
申请公布号	WO8100789(A1)	申请公布日期	1981.03.19
申请号	WO1980US01151	申请日期	1980.09.08
申请人	MASSACHUSETTS INST TECHN	发明人	FAN J;ZEIGER H
分类号	H01L21/208;C30B1/02;H01L21/20;H01L21/263;H01L21/268;H01L31/04;H01L31/18;(IPC1-7):01L21/26;01L21/263	主分类号	H01L21/208
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