| 摘要 |
PURPOSE:To ensure operation of an apparatus and improve its reliability by forming an actuator of a shifter, made of a ferroelectric thin film and movably and releasably supported, and of a stator having a stator electrode. CONSTITUTION:An electrostatic type two-dimensional moving actuator is composed of a shifter 1 and a stator 5. Said shifter 1 constitutes ferroelectric body through forming of a thin film on the surface of a plate composed of alumina ceramics insulator and four metal parts 3a to 3d. Also, a stator 5 forms four electrodes 7a to 7d having the same surface area as that of said metal parts in positions separated by a distance in a given direction from metal parts 3a to 3d, when said stator and the shifter 1 are superposed one upon another, on one surface of a flexible polyimide film. In this manner, if the order of applying voltage to a plurality of electrodes 7a to 7d is selected appropriately, a kind of motion such as coarse motion and fine motion and a direction of movement can be changed variously.
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