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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0233923(A)
申请公布日期
1990.02.05
申请号
JP19880185112
申请日期
1988.07.23
申请人
SONY CORP
发明人
HAMASHIMA TOSHIKI;NISHIHARA TOSHIYUKI;SUMI HIROBUMI;KOYAMA KAZUHIDE;TAJIMA KAZUHIRO
分类号
H01L21/28;H01L21/768
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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