| 摘要 |
<p>PURPOSE:To obtain a compact apparatus at a low cost by performing the detection of the orientation flat of a wafer, the sucking and removal of the wafer for aligning the orientation flat and the rotation of the wafer with a transfer robot. CONSTITUTION:The following parts are provided: a transfer means 11 having at least the function for moving a wafer 1 on a straight horizontal line and for rotating the wafer 1; a sensor 12E which detects an orientation flat 1A of the wafer 1 based on the rotation of the wafer 1; and control circuit which controls the driving of the transfer means 11 based on the detected signal from the sensor 12E. When the transfer means 11 rotates the wafer 1, the orientation flat 1A of the wafer 1 is detected with the sensor 12E. The transfer means 11 rotates the wafer 1 based on the detected signal from the sensor so as to align the orientation flat 1A to the specified direction. Thus, the apparatus can be made compact, and the cost can be lowered.</p> |
