发明名称 Toroidal low-field reactive gas source
摘要 An apparatus for dissociating gases includes a plasma chamber that may be formed from a metallic material and a transformer having a magnetic core surrounding a portion of the plasma chamber and having a primary winding. The apparatus also includes one or more switching semiconductor devices that are directly coupled to a voltage supply and that have an output coupled to the primary winding of the transformer. The one or more switching semiconductor devices drive current in the primary winding that induces a potential inside the chamber that forms a plasma which completes a secondary circuit of the transformer.
申请公布号 US6486431(B1) 申请公布日期 2002.11.26
申请号 US20000659881 申请日期 2000.09.12
申请人 APPLIED SCIENCE & TECHNOLOGY, INC. 发明人 SMITH DONALD K.;CHEN XING;HOLBER WILLIAM M.;GEORGELIS ERIC
分类号 H05H1/46;H01J27/16;H01J37/32;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):B23K10/00 主分类号 H05H1/46
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