| 摘要 |
A substrate table, a substrate processing apparatus and a method for manufacturing the substrate table are provided to restrain the nonuniformity of etching due to a convex portion of the substrate table itself by using a protruded peripheral portion. A substrate table(4) comprises a table body(4a), a plurality of convexities, and a peripheral portion. The plurality of convexities(7) are protruded from a reference surface(5a) of the table body. The peripheral portion(6a) encloses the reference surface. The peripheral portion has a larger height than those of the plurality of convexities, so that a substrate is capable of being loaded on the peripheral portion instead of the convexities. The peripheral portion has an upper flat surface.
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