发明名称 光硬化性ナノインプリント用組成物およびパターンの形成方法
摘要 PROBLEM TO BE SOLVED: To provide a composition for photocurable nanoimprint excellent in long term storage stability, allowing easy pattern transfer even when a metal mold is pressed with a comparatively low pressure, excellent in adhesiveness with a substrate of the pattern, excellent in transferability of a nanoimprint pattern, and excellent in photocurability.SOLUTION: The composition for photocurable nanoimprint includes: (A) an organosilicon compound having a (meth)acrylic group; (B) a specific metal alkoxide; (C) a polymerizable monomer having a (meth)acrylic group; and (D) a photopolymerization initiator, but does not substantially contain water.
申请公布号 JP5975814(B2) 申请公布日期 2016.08.23
申请号 JP20120202218 申请日期 2012.09.14
申请人 株式会社トクヤマ 发明人 梅川 秀喜;佐藤 誠
分类号 H01L21/027;B29C59/02;C08F2/44 主分类号 H01L21/027
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