| 摘要 |
PURPOSE:To reduce the number of manufacturing processes, and to reduce manufacturing cost of a memory unit by a method wherein a gate on a channel region at an EP-ROM region is also made to have a one layer construction. CONSTITUTION:An insulating film provided on a floating gate 27 up to this time is made as an insulating film 28 forming in line laterally with a channel region 5 interposing an element isolation region 22a between them, a control gate 29 is provided under the insulating film 28, the floating gate 27 is provided communicating on an insulating film 6 and the insulating film 28 crossing the element isolation region 22a, and an EP-ROM of a one layer construction is formed. The gate on the channel region of the EP-ROM can be made to have the one layer construction according to this constitution, and a one chip microcomputer assembled with the EP-ROM can be formed at low cost, for example. |
