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发明名称
DEVICE FOR SPECTROSCOPY OF DEEP LEVEL TRANSIENT PROCESSES
摘要
申请公布号
SU1435163(A3)
申请公布日期
1988.10.30
申请号
SU19823510226
申请日期
1982.11.02
申请人
MAGYAR TUDOMANYOS AKADEMIA
发明人
DERD FERENTSI,HU;YANOSH BODA,HU;FERENTS TOT,HU;PETER KHORVAT,HU;LASLO BENKOVICH,HU;LASLO DOZHA,HU
分类号
G01N27/00;G01R31/26;G01R31/28;H01L21/66
主分类号
G01N27/00
代理机构
代理人
主权项
地址
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