发明名称 WIRE BONDING APPARATUS
摘要 PURPOSE:To stop a bonding operation when a wire is approached to its end irrespective of the existence of a spark discharge by a method wherein, when the wire in a nonuse region insulated from a spool is discharged and comes into contact with a support part, a detection part detects that a part between the support part and the end of the wire in the nonuse region has become nonconducting. CONSTITUTION:An amount of a wire 5 set on a spool 4 is reduced as a product is manufactured; when the wire 5 of a prescribed amount is consumed, a wire insulating part 5a is drawn out from the spool 4 and comes into contact with a support part 6. When the wire insulating part 5a comes into contact with the support part 6, a detection part 8 detects that the wire 5 between the support part 6 and an end part 5b has become nonconducting. A wire-end detection signal 8a is output to an alarm apparatus and informs an operator of this situation; the signal 8a is output to a bonding driving apparatus. Thereby, it is possible to prevent that a defective loop shape and a disconnection of a wire are caused during a bonding operation.
申请公布号 JPH02229441(A) 申请公布日期 1990.09.12
申请号 JP19890048604 申请日期 1989.03.02
申请人 OKI ELECTRIC IND CO LTD 发明人 TAKEMURA KUNIKAZU
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
主权项
地址