CHARGED PARTICLE BEAM LITHOGRAPHY METHOD,申请号JP19930168578-传众专利搜索

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发明名称	CHARGED PARTICLE BEAM LITHOGRAPHY METHOD
摘要
申请公布号	JPH07130594(A)	申请公布日期	1995.05.19
申请号	JP19930168578	申请日期	1993.06.15
申请人	JEOL LTD	发明人	KAWASE YUICHI
分类号	H01L21/027;(IPC1-7):H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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